Wolfe Engineering offers a variety of chemical delivery design solutions for TEOS, photochemicals, CMP, copper solutions and solvents. Wolfe Engineering’s expertise ranges from facility distribution systems to point-of-use dispense solutions.
Chemical delivery systems require unique safety and code compliance expertise. Wolfe Engineering’s ability to preserve the integrity of the process chemicals with Teflon and stainless steel design solutions is unmatched in the industry.
Wolfe Engineering provides the following chemical delivery applications:
- Slurry, acids, TEOS, ECP chemicals, photo chemicals
- Chemical cabinets, on-tool modules, dilution/blending systems
- Cost reduction, design optimization, system layout/packaging, improved reliability/maintainability
- Turnkey systems from market requirement statements
- Integrated electronics & control systems
- Safety & code compliance component selection